Integration of a Temperature Sensor into a Modular, Multifunctional Micro Sensor Family

摘要

A new approach for the development and fabrication of micro sensors is applying a modular sensor concept. By using a toolbox of standardized basic sensor elements, a multitude of sensor variations can be realized. So far, a family of modular magnetic micro sensors, covering both strain measurements and magnetic material analysis, was developed. With this work, the sensor family is augmented by thermal measurement capabilities. To do so, a positive temperature coefficient (PTC) Pt temperature micro sensor was developed and integrated into the magnetic sensor family. The work aims at supporting "genetically intelligent" (gentelligent) machine tools.