Effects of Loading Type And Cavity Position On The Pattern Height In Micro-manufacturing of A15083 Superplastic Alloy And Zr_(62)Cu_(17)Ni_(13)Al_8 Metallic Glass

摘要

Vibrational micro-forming of pyramidal shape patterns was conducted for an Al superplastic alloy, Al 5083 and a Zr-based bulk metallic glass, Zr_(62)Cu_(17)Ni_(13)Al_8. A vibrational micro-forming system was specially designed for generating vibrational load by combining a PZT actuator with a signal generator. Si micro dies with wet-etched pyramidal patterns were used as master dies for vibrational micro-forming. The micro-formed pattern height was increasing with increasing the frequency of the vibrational load. In particular, the vibrationally-microformed pattern height is similar or even higher than the statically-microformed pattern height when the load frequency exceeded about 125 kHz. It was also observed that the crystal grains affect the surface quality of the microformed pattern and the distribution of the pattern height in the die cavity array.