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Fabrication of the GaAs based terahertz photoconductors and the photometer for Tera-GATE

机译:基于GaAs的Terahertz光电导体和Tera-Gate的光度计制造

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The present status of the development of an extrinsic photoconductor based on a high-purity GaAs is reported. Thisphotoconductor utilizing the shallow donor levels in GaAs and is highly sensitive for incident terahertz photons in thewavelength range 150 to 300 micron. The n-type GaAs crystal has been growth by liquid phase epitaxial (LPE) method,which is suitable to obtain thick and high-purity GaAs. The impurity concentration in GaAs layer has been decreased tothe order of 10~(13)atoms/cm~(-3). By doping the donors lightly in LPE growth process, C/Si, (background doped) Se andTe doped GaAs layers has been fabricated. The GaAs photoconductors using these crystals are sensitive in longerwavelength region than Ge:Ga photoconductors used in the past far-infrared astronomical observations. The most sensitive detector is obtained with C or Si background doped GaAs, of which NEP is reached to 3x10~(-16)W/Hz~(0.5)at thetemperature of 1.5 K, at 290 micron, the peak of its responsivity spectrum. A balloon-borne telescope utilizing our GaAs photoconductors, Tera-GATE (THz observation with GaAsphotoconductors and a balloon-borne Telescope) is now under development. The Tera-GATE is a 69 cm diametertelescope. On its focal plane, a photoconductor array with Winston cone has 2-mm entrance aperture and leads theincident photons to a cavity where 0.5-mm size photoconductor is installed. Measured optical efficiency of thecone/cavity system is in an acceptable range —40 percent.
机译:报道基于高纯度的GaAs外在感光体的发展的当前状态。 Thisphotoconductor利用GaAs中的浅施主能级和在thewavelength范围150至300微米为入射太赫兹光子高度敏感。在n型GaAs晶体已经通过液相外延(LPE)法,这是合适的,以获得厚和高纯度的GaAs生长。在GaAs层的杂质浓度一直降低的10〜(13)置位顺序原子/ cm〜(-3)。通过在LPE生长工艺轻轻掺杂供体,C / Si的,(背景掺杂的)硒andTe掺杂GaAs层已经制造。使用这些晶体的GaAs光电导开关是在除了Ge longerwavelength区敏感:在过去的远红外天文观测用镓光电导体。用C或Si背景中获得的最灵敏的检测器掺杂的GaAs,其中在达到3×10 NEP〜(-16)W /赫兹为1.5的K thetemperature〜(0.5),在290微米,它的响应光谱的峰值。气球携带的望远镜利用我们的GaAs光电导,万亿-GATE(太赫兹观察GaAsphotoconductors和气球携带的望远镜)目前正在开发中。该万亿门是69厘米diametertelescope。在其焦平面,光电导体阵列温斯顿锥体具有2毫米入口孔和导线theincident光子到安装0.5毫米尺寸感光体的空腔。 thecone /腔系统的测量的光学效率是在可接受范围内-40%的。

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