Strategies for low cost imprint molds

摘要

The Cost of ownership (COO) due to the mold can be minimized by first creating the smallest possible original.The cost of this original can be reduced by using the lowest possible resolution pattern generator. If the pattern isregular, then analog pattern generation such as interferometry can be used. The small original is then copied to coverthe area by either Step and Repeat or Tiling. Finally multiple working copies are made in a tooling tree forproduction imprint. The cost and life of the working copies depends on the imprint technology.