Fabrication of Passive Wireless Sensor by Pulsed Laser Scribing of Indium Tin Oxide

摘要

Passive wireless sensors have been studied by many groups as means of sensing chemical and physical properties in inaccessible locations without the need to include a power source at the sensor location. Indium tin oxide (ITO) thin films are attractive for gas sensing. In this work, we show that laser scribing can be effectively used to fabricate an antenna structure from ITO thin films. This structure is suitable for a wireless chemical sensor.