Development of Integrating Ampere Controller for Additive Auto Supply System using for Surface Electroplating Process

摘要

As line width of electric circuit is changing to micrometer range by miniaturization of electronics, surface treatment is emphasized gradually. Development of additive is increasing and additive having high quality is using. For quality control of surface treatment, additive auto supply system, can control the concentration of additive with low variation, is required. In this work, additive auto supply system is proposed, and experiment is conducted to verify the performance of developed additive auto supply system.