Micro-patterning layers by flame spray aerosol deposition

摘要

Here we present a CMOS-compatible, two-step method for deposition and in-situ mechanical stabilization of gas sensitive, metal-oxide microlayers on wafer-level. Lace-like highly porous, Pt-doped SnO{sub}2 nanostructured layers are deposited at wafer-level on 69 microsensors. Second, these layers are converted in well-adhered, cauliflower-like structures (figure 1b, inset). The resulting sensor layer performance is characterized using the analytes CO and EtOH on microsensor devices.