Electron Emission Properties of CNT Arrays Grown with Micro Molding In Capillary (MIMIC) Assisted Process

摘要

Carbon nanotube arrays were fabricated using micro molding in capillary (MIMIC) process. Patterns remained on the surface in the pattern complementary to that present in the mold. CNTs were selectively grown on the MIMIC patterned sites with a triode PECVD. And turn on field for 10 μA/cm~2 electron emission current was 2.2 V/μm turn on field.