A nanostructured titanium dioxide (TiO_2) thin film gives high transmittance and good refractive index in the visible region with chemical stability and good durability in environments [1]. Due to promising in optical, electrical, chemical and structural properties, the TiO_2 thin films have been widely used for many applications such as photocatalyst [2], multilayer optical coating [3], thin film devices for solar cell [4] and also in sensor applications [5]. The TiO_2 films are used in many electronic applications due to their high dielectric constant [6]. Many attempts have been made to modify the physical, chemical and optical properties of the TiO_2 thin films by doping with transition metal oxides, which widens their potential applications.
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