Fabrication of Arrayed Waveguide Grating by the Casting Method using a Micro-die

摘要

We proposed a fabrication process of an Arrayed Waveguide Grating (AWG) for a Wavelength Division Multiplexing (WDM) system by a casting method using a micro-die. First, we proposed a fabrication process of a micro-die by an electro-plating after fabricating the mother shape with a thick photo resist SU-8. Then, we aim to fabricate the AWG for the WDM system using the fabricated micro-die with an UV cure material. By using SU-8 resist, the fabrication process using dry etching equipments cold be deleted. As the result, it is possible to decrease fabrication time and cost, and finally we could fabricate an AWG by the casting method.