Self-Supported Pitch-Variable Guided-Mode Resonant Grating Filters at Telecom Wavelengths

摘要

We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.