FROM DESPERATE TO DISPARATE: BROAD ARRAY OF CENTIMETER TRAVEL, PICOMETER RESOLUTION, HIGH STIFFNESS PIEZOMECHANISMS SUDDENLY ENABLES A WEALTH OF NEXT-GENERATION TOOLS

摘要

The field of piezo motion control has expanded rapidly in recent years, with a wealth of new concepts introduced or under active exploration, all aimed at eliminating piezos' former travel limitations while preserving their unmatched resolution, responsiveness and throughput capabilities. Consequently, not only is piezo actuation increasingly suitable for applications formerly addressable only by magnetic motors, but significant benefits accrue in terms of size, speed, fieldlessness, reliability, vacuum compatibility, resolution, dynamics and reliability. These in turn are enablers for significant advances in existing and new applications.