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Fusion of Multi-Length Scale CT to Characterize a Pillar Array

机译:多长度尺度CT的融合来表征柱子阵列

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Additive Manufacturing capabilities are reaching the point where it is possible to fabricate single objects with part dimensions ranging from micrometers to meters out of multiple materials. Characterizing the object structure over these length scales increasingly relies on x-ray computed tomography (CT). However, as the material and size ranges continue to increase, the requirements often exceed the capabilities of a single measurement instrument and require the fusion of multi-length-scale and multimodality data. We have developed a range of X-ray CT capability to meet such needs. [1] We describe new X-ray CT capabilities at LLNL to characterize small (micrometer to millimeter) objects with 50 nm to several μm spatial resolution. This work describes the fusion of absorption and phase-contrast NanoCT to characterize the 3D submicron deposition of boron on a silicon pillar array.
机译:添加剂制造能力达到了可以制造单个物体的点,其中部分尺寸范围为微米到多种材料的仪表。在这些长度尺度上表征对象结构越来越依赖于X射线计算机断层扫描(CT)。然而,由于材料和尺寸范围继续增加,要求通常超过单个测量仪器的能力,并且需要多长度和多模数据的融合。我们开发了一系列X射线CT能力,以满足这些需求。 [1]我们描述了LLNL的新X射线CT功能,以表征具有50nm至几μm空间分辨率的小(千分尺到毫米)对象。这项工作描述了吸收和相位对比纳米的融合,以表征硼柱阵列上的硼的3D亚微米沉积。

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