DIRECT ENGRAVING OF 20-pM WIDE PATTERNS INTO A NI-PLATED ROLL USING FIBER LASER

摘要

For low-cost and mass production in printed electronics, electronic ink is transferred onto a flexible substrate using a printing roll. It generally is fabricated by the indirect laser engraving method in which a laser beam is scanned over a photoresist (PR) film pre-coated on a Cu plated roll in order to form an etch barrier for chemical wet etch of the Cu layer. On the patterned Cu layer, chromium is thinly electroplated to finish the indirect printing roll engraving process.