TACTILE-OPTICAL MICROPROBES FOR THREE DIMENSIONAL MEASUREMENTS OF MICROPARTS

摘要

Three dimensional measurements of micro parts require accurate multisensor coordinate measuring machines with precise optical and tactile sensors. The Fiber Probe is an outstanding established technology which combines both principles. The probing forces are in the range of a few micro newtons. Probing spheres with diameters down to 20 μm are commercially available. The 2D version of this microprobe technology has been established in industry for many years. 3D coordinates can be determined by combination of 2D information provided by measurement of the lateral position of the probing sphere and Z readings of the CMM scale. This presentation will show different possibilities to extend the application range of this kind of probes toward full 3D capabilities. Different approaches like the stereoscopic detection of the probing sphere, a speckle pattern based analysis of the Z deflection and a new multisensor technique will be presented. We will also report on results of accuracy tests of the first prototypes of these 3D fiber probes.