Surface Finishing of New-Type RS-SiC Ceramics

摘要

The bending strength of a new type RS-SiC is about two times that of other SiC ceramics. In this research, the surface finishing of three types of SiC ceramics (RS-SiC, PS-SiC, CVD-SiC) were performed with ELID mirror grinding technique. The grinding force and micro hardness were investigated for the new-type RS-SiC. It was found that, the micro hardness of near-surface layer could increase by more than 80% under special finishing conditions. The mechanism of the 'near-surface hardening' phenomenon was discussed. Additionally, a lightweight RS-SiC mirror with 250mm in diameter was finished by ELID technique, and as a result, the surface roughness reached 1.5nmRMS.