Study of magnetic field assisted mechanochemical polishing process for inner surface of Si{sub}3N{sub}4 ceramic components Finishing characteristics under wet finishing using distilled water

摘要

This study discusses the finishing characteristics of a magnetic field assisted mechanochemical polishing process using Cr{sub}2O{sub}3 abrasive mixed with magnetic particles in the case of wet finishing using distilled water, which was proposed for internal finishing of Si{sub}3N{sub}4 fine ceramic tubes. It was clarified that a highly accurate finishing can be achieved more efficiently in the case of wet finishing using distilled water compared with dry finishing. Moreover, those conditions necessary to achieve high efficiency finishing are discussed.