Research on Measuring Surface Roughness by Light Scattering Method

摘要

In this paper, the relation equation between the scattering light and the rough surface is deduced from the established simplified model. Based on the research on the scattering spectrum, some functions or parameters, which are in one-to-one correspondence with the magnitude of the surface roughness, are found out to represent the surface roughness. And these functions or the parameters are used in the mathematical model, which represents the relationship between the surface roughness and the light scattering spectrum. On the basis of the theoretical research, a measurement system of the surface roughness is composed of the semiconductor laser and the cygnal single chip microcomputer, and some experiments are carried out.