INCREASE IN CONCENTRATION OF A Zn-CONTAINING VOLATILE COMPLEX BY UV IRRADIATION OF A TARGET FOR ZnO FILMS SYNTHESIS

摘要

An increase in concentration of a Zn-containing volatile complex for synthesis of ZnO films was investigated when processing their target by ultraviolet radiation emitted by mercury lamp. The experiments were carried out using a flow-type quartz reactor. ZnO tableted target was preliminarily irradiated during 2 to 7 hours. H{sub}2O{sub}2 (98%) vapor at 25Pa passed through the reactor with ZnO target at 373K. As substrate material, five subsequent quartz cylinders were used at 423K. The experiment lasts 4 hours. H{sub}2O{sub}2 decomposition on ZnO surface was accompanied by formation of a Zn-containing volatile complex which passed in gas phase and decomposed on the substrates with isolation of final ZnO. The concentration of the Zn-containing volatile complex (N) in gas phase increases with UV pre-irradiation time (t) (without irradiation N = 1.05·10{sup}11 particles/cm{sup}3; after t=2 hours, N = 5.19·10{sup}11 particles/cm{sup}3, after t=4 hours, N = 9.95·10{sup}11 particles/cm{sup}3; after t=7 hours, N = 1.86·10{sup}12 particles/cm{sup}3.