A Micromachined Robust Planar Triggered Sparkgap Switch for High Power Pulse Applications

摘要

High voltage switches capable of operating at high speeds over a wide range of voltages and energies are used in a variety of applications in material science and plasma physics. Fast rising, low impedance electrical discharges from a capacitor system have applications ranging from transient testing of digital transmission lines to initiation of single and multi-point detonators in various ordnance systems. Of particular interest is the use of smaller scale capacitor discharges in single point, in-line fuzing systems such as those using slapper detonators. Semiconductor switches have been previously considered for such applications. However, the cost associated with such devices may be prohibitive in some high volume ordnance systems. Recent development of lower voltage, low cost slapper detonators has resulted in slappers being reconsidered for some comparatively inexpensive in-line systems. The design, fabrication and characterization of a monolithic high voltage switch is discussed which could be used with low voltage slapper detonators. The structure consists of a planar electrode arrangement that is capable of standing off a potential in excess of 1000V. The structure can be electrically or optically triggered. The device is capable of switching high transient currents. The device can be integrally packaged with a stripline geometry in order to reduce interconnect parasitic impedances to a minimum. The utilization of standard microelectronic fabrication techniques will be emphasized in the design. This will allow for economic manufacturing in large volumes.