Pulsed Laser Deposited Barium Ferrite Films with Low Ferromagnetic Resonance Linewidths - Plume Position as a Global Property Control Parameter

摘要

High anisotropy low loss hexagonal M-type barium ferrite (BaM) thin film materials are promising candidates for use in MMIC devices such as circulators and isolators. The method of choice for the production of such films is pulsed laser deposition (PLD). While progress has been made in the PLD growth of such films [1-4], there is a wide variance in linewidths and film quality in general. There was some limited work in Refs. 1 - 4 on the optimization of film properties through a variation in substrate temperature, oxygen partial pressure, and post-deposition annealing conditions. No one, however, has been able to provide a comprehensive and systematic map of the ferromagnetic resonance (FMR) linewidth, for example, for a full range of the PLD parameters, including laser energy and the deposition geometry as well as those listed above.