Ferromagnetism of Co-doped ZnO has been reported to be due to different origins including carrier-mediated ferromagnetism, Co clusters and unknown secondary phases. The large disparity in experimental results is mainly caused by the fact that the properties of Zn{sub}(1-x)Co{sub}xO tend to be very sensitive to the preparation methods and conditions, which in turn makes it difficult to conduct systematic studies. To shed some light into the origin of ferromagnetism in ZnO:Co, in this work, we report a systematic study of highly doped Zn{sub}(1-x)Co{sub}xO thin films prepared by sputtering.
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