Slit design consideration on the ferromagnetic RF integrated inductor

摘要

The quality factor, Q, of a ferromagnetic RF integrated inductor becomes high in the GHz range by applying slits to the magnetic film because the ferromagnetic resonance (FMR) losses can be reduced at the frequency range of interest[1],[2]. Arose here is a new geometrical design parameter -^sThe location of slits on the magnetic film with respect to the legs of coil turns. Both stray capacitance and magnetic filed distribution in the inductor largely depend on this parameter. Five types of RF integrated spiral inductors have been microfabricated and measured to discuss this parameter in this paper.