Siliconus Maximus

摘要

Recent discoveries reveal new promise for a technology formerly assumed to be extinct, CCDs. Silicon processing technology has made tremendous strides over the past 30 years enabling higher quality and ever larger CCDs. We will discuss prior and ongoing experience with large area CCD focal-plane arrays, which include innovative design and fabrication techniques that ensure performance and yield. Semiconductor Technology Associates (STA) will describe the development of an ultrahigh resolution large area CCD (up to the maximum limit of a 150 mm wafer) integrating high dynamic range and fast readout.