PRECISION ASSEMBLY OF ACTIVE MICROSYSTEMS WITH A SIZE-ADAPTED ASSEMBLY SYSTEM

摘要

The paper presents a size-adapted assembly system for the automated precision assembly of active microsystems. The part sizes of the microsystems can reach centimeter range, but they must be assembled with an assembly accuracy of about a few micrometers. The results of a sensor guided assembly process using a 3D vision sensor are shown. This process reaches a positioning uncertainty of 1.2 μm and an assembly uncertainty of 36 μm.