Efficient Atomization Using MHz MEMS-Based Ultrasonic Nozzles

摘要

This paper reports on the preliminary results of atomization using micro-ejectro-mechanical system (MEMS)-based 3-Fourier horn 0.5 MHz silicon ultrasonic nozzles* The droplets produced are monodisperse with 7.1 im drop diameter in good agreement with that predicted by pure capillary wave atomization mechanism. This drop diameter is much smaller than that obtainable using conventional ultrasonic nebulizers operating at three times higher frequency.