Preparation of Intercalative Organic/MoO{sub}3 Nanohybrid Thin Films and Their VOC Gas Sensing Properties

摘要

Organic/MoO{sub}3 nanohybrid thin films have been successfully prepared by an ex-situ intercalation process. The host MoO{sub}3 films were first deposited on LaAlO{sub}3 (LAO) single crystal substrates by using a CVD method followed by the intercalation of butylammonium ions, (BuNH{sub}3){sup}+, into the MoO{sub}3 films to give (BuNH{sub}3){sub}xMoO{sub}3 thin films. The preparation of highly b-axis oriented MoO{sub}3 films is crucial to prepare the (BuNH{sub}3)xMoO{sub}3 films. The (BuNH{sub}3){sub}xMoO{sub}3 thin films exhibit a resistance-increasing response to aldehyde gases as in the case of bulk samples, whereas no response was observed for methanol, ethanol, chloroform, acetone, toluene, and xylene. The thin film process developed for intercalative organic-inorganic hybrid makes it possible to apply this material in VOC sensor devices.