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Laser-induced thermal effects on optical and tight-emitting properties of free-standing silica films containing Si nanocrystals

机译:激光诱导的热效应含有Si纳米晶体的自由静态二氧化硅膜的光学和密封性能

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A Raman and photoluminescence study of a thermally annealed free-standing film of silica containing Si nanocrystals is reported with emphasis on laser-induced thermal effects. The Si-rich silica film on a Si substrate was prepared by a molecular beam deposition method and annealed at 1150°C for 1 hour in an oven, which promoted Si nanocrystals. Then the Si substrate was partially chemically etched producing free-standing film areas with typical dimensions of 2 mm x 2 mm and thickness of 1.4 μm. For the free-standing film, we observed laser-induced (Ar~+ laser at 488 nm) thermal effects on the light-emitting and optical properties. In fact, the light emission dramatically increases with the laser intensity, up to 4 orders of magnitude at 840 nm when the laser power increases from ~100 to 200 mW, and the absorption coefficient rises considerably as well. The anti-Stokes to Stokes Raman intensity ratio suggests a very high temperature of the free-standing silica film containing Si nanocrystals (~1200 K) upon exposure to a laser power of 100 mW focused to a ~40 μm spot, and the temperature probably rises up to ~2000 K for exposure to a laser power of 200 mW. The light emission measured at the high excitation powers is similar to blackbody radiation although some quantitative deviations occur for the temperature dependence. The Ar~+ laser annealing strongly increases the crystalline Raman peak showing that thermal annealing at 1150°C does not finish structural reorganization of the SiO_x material. In the waveguiding detection geometry, the spectral narrowing of the photoluminescence is observed and used to estimate the refractive index.
机译:报道了含有Si纳米晶体的热退火独立式膜的拉曼和光致发光研究,重点是激光诱导的热效应。通过分子束沉积方法制备Si衬底上的富含Si的二氧化硅膜,并在1150℃下在烘箱中退火1小时,促进Si纳米晶体。然后将Si衬底部分化学蚀刻产生自由静态膜区域,其典型尺寸为2mm×2mm,厚度为1.4μm。对于独立薄膜,我们观察了激光诱导的(AR +激光为488nm)对发光和光学性能的热效应。实际上,当激光功率从〜100至200 mW增加时,发光随着激光强度而显着增加,在840nm处,在840nm处高达4个数量级,并且也很容易吸收系数。抗震术中的抗炮雾拉伸强度比在暴露于〜40μm斑点的激光功率时,含有Si纳米晶体(〜1200k)的自由静态二氧化硅膜的非常高温,并且可能高达2000 k〜2000 k接触200兆瓦的激光功率。在高励磁功率下测量的发光类似于黑体辐射,尽管对温度依赖性发生了一些定量偏差。 Ar〜+激光退火强烈增加了结晶拉曼峰,显示1150℃下的热退火未完成SiO_x材料的结构重组。在波导检测几何形状中,观察到光致发光的光谱缩小并用于估计折射率。

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