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Magnetorheological finishing and subaperture stitching interferometry of large and lightweight optics

机译:大型轻质光学的磁流变精加工和亚曲线缝合干涉测量

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Significant challenges are faced in the manufacturing of the complex optics for the next generation of astronomical telescopes. Process improvements are required to establish cost effective techniques to finish the optics to the tight specification required in a timely manner. An added complication is realized when the optics are lightweight. The non-uniform support of the face-sheet in this case requires special efforts to avoid a print-through of the cell structure due to fabrication processes, gravity and/or cryogenic effects. Magnetorheological finishing (MRF) is a deterministic, sub-aperture polishing process that has been a revolutionary success in the fabrication of optics in the size range of 10-1000 mm. This production proven process is capable of polishing flats, spheres, aspheres and cylinders to a surface figure accuracy of better than 30 nm peak-to-valley (better than 5 nm rms), and microroughness better than 1 nm rms on a variety of glasses, glass ceramics and single crystal materials. Unique characteristics of MRF such as a high, stable removal rate, conformal nature of the sub-aperture tool and shear mode of material removal give it advantages in the finishing of large and lightweight optics. These qualities provide for a cost-effective process with a high rate of convergence that requires few iterations. Such a technology is ideally complemented by a system for the stitching of interferometric sub-aperture data. Stitching inherently enables the testing of larger apertures with higher resolution and, thanks to the built-in calibration, even to higher accuracy in many situations. While this approach enables the non-null testing of parts with greater aspheric departure and can lead to a significantly reduced non-common air path in the testing of long-radius concave parts, it is especially effective for convex optics. That is, stitching is particularly well suited to the testing of secondary mirrors and, alongside the testing of the off-axis primary segments.
机译:在下一代天文望远镜的复杂光学制造方面面临着重大挑战。需要处理改进以建立成本有效的技术,以及时完成所需的紧密规格。当光学器件轻量级时,实现了添加的复杂性。在这种情况下,面板的不均匀支撑需要特殊努力,以避免由于制造工艺,重力和/或低温效应引起的电池结构的印刷。磁流学精加工(MRF)是一种确定性,子孔径抛光过程,其在尺寸范围为10-1000mm的光学器件中一直是革命性的成功。该生产经过验证的工艺能够抛光平面,球体,非球面和气缸,以优于30nm峰 - 谷(优于5nm rms)的表面图精度,并且微室在各种眼镜上优于1nm rms ,玻璃陶瓷和单晶材料。 MRF的独特特性如高,稳定的去除率,子光圈工具的保形性质和材料去除的剪切模式,在大型轻质光学的整理中提供了优势。这些品质提供了具有很高的收敛速度的成本效益的过程,这需要很少的迭代。这种技术理想地通过用于干涉子孔径数据的缝合系统的系统互补。拼接固有地使得能够通过更高的分辨率测试更大的孔径,并且由于内置校准,即使在许多情况下高度准确性也是更高的准确性。虽然这种方法使得具有更大的非球面偏离的部件的非空测试,并且可以导致长达半径凹部的测试中的显着减少的非常见空气路径,这对于凸光学器件特别有效。也就是说,缝合特别适合于对辅助镜的测试以及脱轴主段的测试。

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