A study on the removal capability of AMC photocatalyst by titanium dioxide (TiO_2) with apatite

摘要

TMS which is generated from HMDS, is low voiling point material. So it is difficult to catch the TMS by physical adsorption material. As a candidate of chemical filter for such small molecular weight gasses, we investigate of photocatalyst by titanium dioxide (TiO_2) with apatite coating. As a result, photocatalyst by titanium dioxide (TiO_2) with apatite understood that there was not an adsorption and oxidation of TMS. However, by the irradiation of ultraviolet rays, TMS is easy to come to change in D2. We understood that there became little quantity that TMS left from a chemicalfilter.