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Behavior of hydrogen peroxide mist generated with ultrasonic atomization and condition examination of clean room decontamination

机译:用超声雾化产生的过氧化氢雾的行为及洁净室净化条件检查

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We have studied the behavior of hydrogen peroxide mist which was generated by ultrasonic atomization on the decontamination of a chamber. The number concentration and mass concentration of particles as a function of diameter were measured by using a WPS measuring instrument (DMA+CPC + optical scattered counter) to clarify the behavior of mist. The data suggested that 98 percent or more of the mist was vaporized in an instant, although some heterogeneous nucleation was observed. The sterilization of a clean room where the hydrogen peroxide mist was used is achieved because of moderate humidity and the hydrogen peroxide of 52g against a clean room of 40m~3.
机译:我们研究过过氧化氢雾的行为,其通过超声雾化产生的腔室的净化。通过使用WPS测量仪器(DMA + CPC +光学散射计数器)测量作为直径函数的颗粒的数量浓度和质量浓度,以阐明雾的行为。数据表明,虽然观察到一些异质成核,但蒸发了98%或更多的雾化。使用过氧化氢雾的洁净室的灭菌是由于中等湿度和52g的净氧化氢,净氧化氢为40m〜3的净氧化氢。

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