Development of energy-saving humidification system using compressed air atomizers with dual control system

摘要

It In the cleanrooms of semiconductor manufacturing factories, the energy saving is being demanded to reduce the operation cost and the environmental burden. The huge air-conditioned outside air (OA) is always supplied to the cleanroom. In winter, the OA is humidified to the absolute humidity of the cleanroom. At the same time, the cleanroom is cooled even in winter by the huge heat load form manufacturing equipments. The humidification system using compressed air atomizers is an effective energy-saving system to the factory with which such humidification and cooling are needed simultaneously. We developed the humidification system of the energy saving which can control both the amount of air and amount of water of the atomizers. The conventional system controls only amount of water, so the amount of compressed air that consumes many electric power is always same even the humidification is not required so much. On the other hand, our system controls the droplet size constant by controlling both amount of air and water. It makes the amount of compressed air minimum. By adding this system, a heat source system may completely become unnecessary.