Smart Sensor-Actuator-System - Polymer Sensor Coupled with an Piezoelectric Actuator

摘要

New fields of applications for piezoelectric actuators can be achieved by compensating the deflection shifts in cases of hysteresis and vibration. We report here on the design of a coupled piezoelectric multilayer actuator with an integrated polymer sensor to detect the deflection, vibration and external load. Significant results are: (1) An optimal sensor position on the actuator to detect deflection and external load; (2) The demonstration of a polymer sensor structure to increase the sensor signal; (3) The measurements have shown the function of an integrated polymer sensor to detect the bending deflection and the external load.