Systematic design methodology of bistable compliant micro-mechanisms

摘要

A bistable compliant micro-mechanism possesses the distinguish characteristics of both the bistable mechanism and the compliant one. It can be suitably employed in various MEMS devices, such as a micro-relay, an impact sensor, etc. Currently, preventing fracture and enhancing reliability are the most important issues in the application of bistable compliant micro-mechanisms. Through a systematic design methodology, including tuning the parameters of geometric shapes, adding a stopper at the proper position, etc., one can obtain a more appropriate micro-mechanism for designated applications. This paper proposes a systematic methodology for the design of bistable compliant micro-mechanisms.