acoustic arrays; semiconductor technology; micromechanical devices; micromachining; waste; integrated circuit manufacture; chemical vapour deposition; acoustic resonance; photoresists; piezoelectric transducers; finite element analysis; wafer bonding; acoustic actuation; 2D micromachined droplet ejector array; semiconductor fabrication process; MEMS fabrication process; organic polymer deposition; wafers; spin coating; wastage; photoresist; spin-on materials; IC manufacturing; circular membranes; orifices; piezoelectric transducer; array membranes; nonuniform membrane displacements; pressure distribution; fluid reservoirs; finite element method; membrane resonance frequency; ejector design; vibrometer measurements;
机译:飞秒激光微加工基于多孔膜的二维二维喷射器阵列的微微声滴喷射
机译:声驱动的屈伸力SixNy和单晶硅二维微加工喷射器阵列
机译:压电驱动的屈曲微机械超声液滴喷射器
机译:2D声控微机械液滴喷射器阵列
机译:使用二维微机械化微滴喷射器阵列将飞升滴定为皮升滴。
机译:压电微机械超声换能器(PMUT)阵列用于集成传感驱动和成像
机译:用于液滴喷射器的环形pZT致动器的分析