Three Dimensional Moire Interferometer

摘要

A new moire interferometer, known as multifunction 3-D moire interferometry system is developed by authors, which combines the advantages of four-beam moire interferometer with the Twyman/Green interference system .The system can measure in-plane and out-of-plane deformation synchronously with high accuracy and high sensitivity. A compact phase shifter is used to improve the measurement sensitivity. The optical theory, components, key techniques, unique ability, and specifications of the system are described in detail in this paper. Some typical experiments using this system have been done and gained good results.