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Embedded Photodetectors in Polymer Waveguides for Optical Interconnect Integrated with a Si-Ge Transimpedance Amplifier Circuit Operating at 2.5 Gbit/s

机译:聚合物波导中的嵌入式光电探测器,用于光学互连,与在2.5 Gbit / s的Si-Ge跨阻抗放大器电路中集成的光学互连

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Optical interconnection that can be integrated into electrical interconnection systems where high performance lines are necessary offer designers flexible interconnections options as component performance taxes interconnections, and also enables some preferable architectural alternatives [1-4]. Embedding thin film active optoelectronic devices in a substrate/optical waveguide structure can address packaging and alignment issues in the integration of optical interconnections in electrical systems. Thin film devices such as photodetectors and edge emitting lasers can be embedded in waveguides structures and addressed using either direct or evanescent field coupling [1], thus eliminating the need for optical beam turning out of the plane of the interconnection substrate. Since the polymer waveguide is deposited and patterned after the optoelectronic device is bonded to the interconnection substrate, the waveguide to active device alignment is defined through a photolithographic masking step. Finally, the optoelectronic active device/waveguide interfaces are embedded in the waveguide/substrate structure, thus eliminating the need for underfill or hermetic sealing (which applies to bump bonded optoelectronic devices). In this paper, the first report of a photodetector embedded in a polymer waveguide with output to a Si-Ge transimpedance amplifier is reported. This system was tested with an endfire coupled optical input to the multimode polymer waveguide, and, through direct coupling of this light to the photodetector from the waveguide followed by photodetector current output to a Maxim Si-Ge transimpedance amplifier, operation of this interconnection channel at 2.5 Gbps has been demonstrated.
机译:可以集成到电气互连系统中的光学互连,其中需要高性能线路提供设计人员灵活的互连选项作为组件性能税收互连,并且还支持一些优选的架构替代方法[1-4]。在基板/光波导结构中嵌入薄膜主动光电子结构可以解决电气系统中光学互连的集成中的包装和对准问题。诸如光电探测器和边缘发光激光器的薄膜装置可以嵌入波导结构中并使用直接或渐逝场耦合[1]寻址,从而消除了对互连基板的平面的光束的需求。由于在光电器件粘合到互连基板之后沉积和图案化聚合物波导,因此通过光刻掩模步骤限定波导到有源器件对准。最后,光电有源器件/波导界面嵌入波导/衬底结构中,从而消除了对底部填充或气密密封的需要(适用于凸块粘合的光电器件)。在本文中,报道了嵌入在具有输出到Si-GE跨阻抗放大器的聚合物波导中的光电探测器的第一报告。通过对多模聚合物波导的终端耦合光输入测试该系统,并且通过从波导的光电探测器的直接耦合到光电探测器,然后通过光电探测器电流输出到Maxim Si-Ge跨阻抗放大器,在此互连通道的操作已经证明了2.5 Gbps。

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