A general model is presented for calculating of pull-in parameters of nano-electromechanical systems. Theory includes van der Waals forces and presents analytical expressions for pull-in voltage and gap. A role of atomistic corrections for the pull-in at the nanoscale is discussed at length.
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机译：提出了一种用于计算纳米机电系统的拉入参数的一般模型。理论包括van der Waals力，并提出了用于拉入电压和间隙的分析表达。讨论了在纳米级纳米级的原子校正对纳米级的作用。
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