GRAIN GROWTH OF NANOCRYSTALLINE Ru-DOPED SnO2 IN SOL-GEL DERIVED THIN FILMS

摘要

The microstructural evolution of sol-gel-derived nanocrystalline S11O2 in thin films, with and without ruthenium doping, was studied. The starting materials were dried gels containing nano-crystals and partially hydrated solids. Crystallization and grain growth were investigated using x-ray diffraction (XRD) at temperatures from 300 °C to 800 °C. Crystallization of S11O2 occurred rapidly above 700 °C. For equivalent heat treatments, Ru doping suppressed SnO2 nucleation from the gel materials and slowed down the grain growth up to 700 °C. The doping also reduced the (101) texturing of the thin films.