A vibration-resistance phase-shifting interferometer (PSI) was recently constructed and demonstrated. In this instrument, we have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is phase modulating interference fringes fractionizing technology. This method can detect the fringe movement at 1/400 fringe interval, so fringes phase can be locked by the closed-loop feedback within 0.005π . And the instrument implements phase shifting with the same piezoelectric transducer (PZT) that also compensates for vibration as feedback device. A microprogrammed control unit (MCU) is used to process phase information from photoelectric receiver, and then output the control signal to PZT driver. Experiments show that this solution is unique.
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