Scaling method using laser interference for micro-displacement measurement system

摘要

The accuracy of the micro-displacement feed detection and control is decided by the calibration of the system. On the basis of laser interference principle, a new scaling method is introduced. Combining hardware subdivision and software subdivision, the scaling system can calibrate the micro-displacement effectively. The scaling system is composed of optical interferometer, signal processing circuits and microprocessor. Experiments proved that it is feasible to rectify the micro-displacement system with laser interference. The resolution of the micro-displacement is better than 1.0 micron after it was revised.