Microstructure, Mechanical and Magnetic Properties of FeTiN Thin Films by IBAD

摘要

FeTiN thin films with different percentage of Fe,Ti,N deposited by Ion Beam Assisted Deposition technique were studied. The structure and composition of the films were characterized with X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The hardness and reduced elastic modulus of these films were studied using a nano-hardness tester (NHT). The magnetization of the films were measured using a vibration sample magnetometer (VSM). The percentage of Fe,Ti,N had significant effect on the structure, hardness, reduced elastic modulus and magnetization of the FeTiN films, when the percentage of N content was about 8.7%,The mechanical and magnetic properties were excellent relatively.