Polishing studies of Tantalum on Zirconia substrate for Meso-scale device applications

摘要

Tantalum thin film electrodes have potential applications in electrostatic valves. The meso-scale valves are of interest for cryogenic devices and MEMS applications. These valves could be fabricated on ceramic substrate. This is due to Tantalum's excellent adhesive properties on ceramic substrates at cryogenic temperatures.