Two-dimensional simulation of pulsed power electronegative plasmas

摘要

A two-dimensional self-consistent fluid model was developed to study the spatio-temporal dynamics of a pulsed power (square-wave modulated) inductively coupled electronegative (chlorine) discharge. The coupled equations for plasma power deposition, electron temperature, and charged and neutral species densities were solved simultaneously to capture the spatio-temporal evolution of the discharge. Simulation results are discussed with emphasis on the physics of pulsed electronegative discharges.