Effect of residual stress on ferroelectric properties of PZT thin film prepared by metalorganic decomposition

摘要

In the paper, ferroelectric thin films Pb(Zr{sub}0.58Ti{sub}0.42)O{sub}3 were prepared by metalorganic decomposition (MOD). The residual stress in thin film was tested by two methods, which were X-ray diffractometer (XRD) and indentation fracture. In the indentation fracture method, two models including GLFW model and ZCF model were adopted. The results measured by ZCF model were closer to the results measured by XRD. The relationship of properties such as microstructures, ferroelectric response with residual stress was discussed.