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Application of Thermal Gradients to Achieve Orientational Order in Block Copolymer Thin Films

机译:热梯度在嵌段共聚物薄膜中达到定向顺序的应用

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The development of methods that permit control over the long- range order and orientation of microdomains in block copolymer (BCP) thin films for “bottom-up” approaches to nanoscale surface patterning is of great interest for many applications, including microelectronics and data storage devices. One such method recently reported, a type of zone refinement called cold zone annealing (CZA) in which the BCP film is passed across a thermal gradient, was shown to result in long-range orientational order. CZA is a versatile technique that can be combined with other approaches, such as chemical or topographic substrate patterning. Here, we utilize a combination of Rotational Small Angle Neutron Scattering (R-SANS) and specular neutron reflectivity (SNR) to investigate the mechanism and driving forces behind CZA. These unique techniques are used to characterize the 3- dimensional structural properties of zone annealed BCP films, revealing the previously unreported role of thermal gradients in controlling the kinetics and orientation of block copolymer films.
机译:的,其允许在所述长程顺序和嵌段共聚物(BCP)薄膜微畴的取向控制方法的开发“自下而上”的方法,以纳米级的表面图案化是用于许多应用,包括微电子和数据存储设备的极大兴趣。一种这样的方法最近报道,一个类型的区域细化称为其中BCP膜跨越的热梯度通过冷区退火(CZA)中,显示出导致长程取向有序。 CZA是一个通用的技术可以与其他的方法,如化学或地形衬底图案化相结合。在这里,我们利用旋转小角中子散射(R-SANS)和镜面反射率中子(SNR)的组合来研究机构和驱动力后面CZA。这些独特的技术被用于表征区退火的BCP膜的三维结构特性,揭示的热梯度的控制嵌段共聚物膜的动力学和取向的以前未报告的作用。

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