Surface Modification of Silica by Plasma Polymerization Coating

摘要

Silica is one of major components for Epoxy Molding Compounds (EMC) which is extensively utilized to protect microelectronic devices from environmental danagmes due to their good properties,low cost,lightweight and availability [1-2].Therefore,the surface property or adhesion of silica to epoxy resin is a critical factor on the reliability of EMC.