Two-phase full-frame CCD with double ITO gate structure for increased sensitivity

摘要

In 1999, Kodak introduced the first two-phase front-illuminated, full-frame charge-coupled device (CCD) in which the electrodes corresponding to one phase were composed of indium tin oxide (ITO), a material more transmissive than polysilicon. In an effort to further increase the sensitivity of front-illuminated image sensors, Kodak has developed an all-ITO electrode CCD. A 1280 x 1024 sensor with 16-μm pixels has been manufactured and characterized. The imaging performance of this device, including its sensitivity, dark current, and charge transfer efficiency, is described. The noise characteristics of the ITO-gated output amplifier, MOSFET, are also discussed.