3.2-million-pixel full-frame true 2-phase CCD image sensor incorporating transparent gate technology

摘要

This paper describes the performance of an advanced high- resolution full-frame architecture CCD imaging device for use in scientific, medical and other high-performance monochromatic digital still imaging applications. Of particular interest is the replacement of the polysilicon 2nd gate electrode with that of a more spectrally transparent material thereby dramatically improving device sensitivity. This has been achieved without compromising performance in other areas such as dark current, noise, transfer efficiency and, most importantly, yield.