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Development of nanoindentation system and strength evaluation of micro dies in a scanning electron microscopic field of view

机译：扫描电子显微镜视野中微模的纳米压模系统的发展及其强度评价

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《塑性加工連合講演会》|2000年||共2页
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T. Yanagisawa; T. Matsumoto; Y. Saotome; T. Ohashi;
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中图分类 TG3-53;
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Development of nanoindentation system and strength evaluation of micro dies in a scanning electron microscopic field of view

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